Tool bay overview · 01 / 04
The Brief
Semiconductor Fabrication Lab — Bayan Lepas, Penang
A new wafer probe and die-attach area required an ISO Class 5 envelope with unidirectional airflow across the tool bays and a fully static-dissipative floor. CityPoint engineered a walkable ceiling grid at 92% filter coverage and supplied a demountable wall system that allows tool layouts to be reconfigured between product generations.
ESD performance was verified at handover across the whole floor plate, with grounding continuity documented per work cell. Airflow modelling drove the return-air chase positions so that particle counts stay inside class even during tool maintenance.
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Unidirectional airflow with 92% HEPA ceiling coverage
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Static-dissipative epoxy floor, grounded per work cell
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Demountable partitions for future tool reconfiguration
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ISO 14644-1 certification and particle count report
Particle counts came in comfortably inside Class 5 on the first certification run, and the reconfigurable partitions have already paid for themselves.